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Characterization
•Magnetotransport Apparatus
•AC Susceptometer
•Deep Level Transient Spectroscopy
•Ellipsometer
•Femtosecond Laser/ Streak Camera
•Hall Measurement
•Optical Spectroscopy
•Probe Station
•Raman Spectroscopy
•Scanning Electron Microscope
•X-ray Diffraction

Growth
•Molecular Beam Epitaxy
•Plasma Enhanced Chemical Vapor Epitaxy
•Liquid Phase Epitaxy

Device Fabrication
•Photolithography
•Metallization

Plasma Enhanced Chemical Vapor Deposition
Norcon

The PE-CVD is a parallel plate reactor with 13.56 MHz RF.

 

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